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The Mass Air Flow sensor is a very delicate sensor.
Between very fine dirt and the trend towards oiled filters it's very important to keep the MAF clean. MAF sensors also can get contaminated from a variety of sources: dirt, oil, silicon, spider webs, potting compound from the sensor itself, etc. When a MAF sensor gets contaminated, it skews the transfer function such that the sensor over-estimates air flow at idle (causes the fuel system to go rich) and under-estimates air flow at high air flows (causes fuel system to go lean). This means Long Term Fuel Trims will learn lean (negative) corrections at idle and learn rich (positive) corrections at higher airflows.
In the past there really was not any safe way of cleaning them without risk of damaging them. Today CRC Mass Air Flow Sensor Cleaner is the safe and an effective alternative to using aggressive chemicals like brake parts cleaners or carburetor cleaners.